Etching a substrate: processes
Gas phase etching of substrate
With measuring, testing, or inspecting
Inventor
active
Embedded attenuated phase shift mask and method of making...
End point detection in time division multiplexed etch processes
Envelope follower end point detection in time division...
Etching of chromium layers on photomasks utilizing high...
Method and apparatus for process control in time division...
No associations
LandOfFree
Russell Westerman does not yet have a rating. At this time, there are no reviews or comments for this inventor.
If you have personal experience with Russell Westerman, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Russell Westerman will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-P-2269076