4. Coating processes
  5. Electrical product produced
  6. Integrated circuit, printed circuit, or circuit board

Rong Tao

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Auxiliary magnet array in conjunction with magnetron sputtering

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Reexamination Certificate

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Continuous, non-agglomerated adhesion of a seed layer to a...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Dual damascene metallization

Coating processes – Electrical product produced – Integrated circuit – printed circuit – or circuit board
Reexamination Certificate

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Dual damascene metallization

Coating processes – Electrical product produced – Integrated circuit – printed circuit – or circuit board
Patent

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IMP technology with heavy gas sputtering

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1319559

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