4. Optical waveguides
  5. Integrated optical circuit

Rong Hsu

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Combination CMP-etch method for forming a thin planar layer...

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
Reexamination Certificate

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Method for manufacturing a planar reflective light valve...

Semiconductor device manufacturing: process – Chemical etching
Reexamination Certificate

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Planar reflective light valve backplane

Optical waveguides – Integrated optical circuit
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Profile ID: LFUS-PAI-P-2046177

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