Coating apparatus – Gas or vapor deposition
Reexamination Certificate
2007-11-13
2007-11-13
Pert, Evan (Department: 2826)
Coating apparatus
Gas or vapor deposition
C118S726000
Reexamination Certificate
active
11146311
ABSTRACT:
A method and apparatus for generating gas for a processing system is provided. In one embodiment, an apparatus for generating gas for a processing system includes a unitary, isolatable, transportable canister having a plurality of first spacing elements, a plurality of second spacing elements and a solid material disposed within the canister. The spacing elements have different mean diameters. The solid material is adapted to produce a gas vapor when exposed to a temperature above a predetermined level at a predetermined pressure. In another embodiment, an apparatus for generating gas includes a gas source coupled to a processing chamber by a first gas line. A canister is coupled in-line with the first gas line and contains a solid material that produces a process gas when heated. A heater is disposed between the gas source and the canister to heat gas flowing into the canister.
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Applied Materials Inc.
Patterson & Sheridan LLP
Pert Evan
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