Method and apparatus for generating gas to a processing chamber

Details Method and apparatus for generating gas to a processing chamber Method and apparatus for generating gas to a processing chamber

2005-07-12

2005-07-12

Pert, Evan (Department: 2829)

Drying and gas or vapor contact with solids

Apparatus

With fluid current conveying of treated material

C118S715000, C427S248100

Reexamination Certificate

active

06915592

ABSTRACT:
A method and apparatus for generating gas for a processing system is provided. In one embodiment, an apparatus for generating gas for a processing system includes an unitary, isolatable, transportable canister having a plurality of first spacing elements, a plurality of second spacing elements and a solid material disposed within the canister. The spacing elements have different mean diameters. The solid material is adapted to produce a gas vapor when exposed to a temperature above a predetermined level at a predetermined pressure. In another embodiment, an apparatus for generating gas includes a gas source coupled to a processing chamber by a first gas line. A canister is coupled in-line with the first gas line and contains a solid material that produces a process gas when heated. A heater is disposed between the gas source and the canister to heat gas flowing into the canister.

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