Abrading – Abrading process – Glass or stone abrading
Patent
1997-07-31
1999-06-22
Eley, Timothy V.
Abrading
Abrading process
Glass or stone abrading
451285, 451287, 451 6, B24B 100
Patent
active
059137134
ABSTRACT:
A polishing pad and method of polishing with a chemical mechanical planarization apparatus includes providing a bulk polishing pad material having a front polishing surface side and a back side. The polishing pad further includes a polishing pad wear indicator for indicating a polishing pad wear during a life cycle of the polishing pad. The polishing pad wear indicator is formed on the back side of the bulk polishing pad material.
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Cheek Roger W.
Cronin John E.
Nadeau Douglas P.
Rutten Matthew J.
Wright Terrance M.
Banks Derris H.
Eley Timothy V.
International Business Machines - Corporation
Walter, Jr. Howard J.
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