4. Coating apparatus
  5. Gas or vapor deposition
  6. Work support

Roger A. Lindley

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Diagnostic pedestal assembly for a semiconductor wafer processin

Coating apparatus – Gas or vapor deposition – Work support
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Method for shaping a magnetic field in a magnetic...

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
Reexamination Certificate

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Plasma pretreatment of photoresist in an oxide etch process

Semiconductor device manufacturing: process – Chemical etching
Reexamination Certificate

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Plasma processing apparatus

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – Having glow discharge electrode gas energizing means
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Profile ID: LFUS-PAI-P-1318164

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