4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Robert W. Wu

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Adjusting DC bias voltage in plasma chamber

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Adjusting DC bias voltage in plasma chamber

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Bonded silicon carbide parts in a plasma reactor

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Dielectric etch process reducing striations and maintaining...

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
Reexamination Certificate

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Incorporation of dielectric layers in a semiconductor

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
Patent

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Profile ID: LFUS-PAI-P-873411

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