4. Cleaning and liquid contact with solids
  5. Processes
  6. Including application of electrical radiant or wave energy...

Robert T. Fayfield

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Apparatus for processing both sides of a microelectronic...

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
Reexamination Certificate

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Apparatus for surface conditioning

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Cleaning method

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Patent

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Direct vapor delivery of enabling chemical for enhanced HF etch

Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
Patent

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Direct vapor delivery of enabling chemical for enhanced HF...

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
Reexamination Certificate

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Profile ID: LFUS-PAI-P-169600

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