4. Data processing: generic control systems or specific application
  5. Specific application, apparatus or process
  6. Product assembly or manufacturing

Robert Shinagawa

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Apparatus and method for measuring overlay by diffraction...

Optics: measuring and testing – By alignment in lateral direction – With registration indicia
Reexamination Certificate

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Methods and systems for detecting a presence of blobs on a...

Abrading – Precision device or process - or with condition responsive... – With indicating
Reexamination Certificate

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Methods and systems for determining a characteristic of...

Abrading – Precision device or process - or with condition responsive... – Computer controlled
Reexamination Certificate

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Methods and systems for generating a two-dimensional map of...

Abrading – Precision device or process - or with condition responsive... – Computer controlled
Reexamination Certificate

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Methods and systems for monitoring a parameter of a...

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
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Profile ID: LFUS-PAI-P-2389500

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