Abrading – Precision device or process - or with condition responsive... – With indicating
Reexamination Certificate
2006-05-30
2006-05-30
Wilson, Lee D. (Department: 3723)
Abrading
Precision device or process - or with condition responsive...
With indicating
C451S005000
Reexamination Certificate
active
07052369
ABSTRACT:
Systems and methods for detecting a presence of blobs on a specimen are provided. One method may include scanning measurement spots across a specimen during polishing of the specimen. The method may also include determining if the blobs are present on the specimen at the measurement spots. Each of the blobs may include unwanted material disposed upon a contiguous portion of the measurement spots. In some instances, the blobs may include copper. In some embodiments, scanning the measurement spots may include measuring an optical property and/or an electrical property of the specimen at the measurement spots. Another embodiment includes dynamically determining a signal threshold distinguishing a presence of the blobs from an absence of the blobs. An additional embodiment includes determining an endpoint of polishing if, for example, blobs are not determined to be present on the specimen.
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Allen Ronald L.
Bevis Christopher F.
Chen Charles
Chen Haiguang
Lehman Kurt
Conley & Rose, P.C.
KLA-Tencor Technologies Corp.
Wilson Lee D.
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