Abrading – Precision device or process - or with condition responsive... – Computer controlled
Reexamination Certificate
2007-02-13
2007-02-13
Shakeri, Hadi (Department: 3723)
Abrading
Precision device or process - or with condition responsive...
Computer controlled
C451S008000, C451S041000, C451S006000, C438S017000
Reexamination Certificate
active
10358069
ABSTRACT:
Systems and methods for characterizing polishing of a specimen are provided. One method includes scanning a specimen with an eddy current device during polishing to generate output signals at measurement spots across the specimen. The method also includes combining a portion of the output signals generated at the measurement spots located within a zone on the specimen. In addition, the method includes determining a characteristic of polishing within the zone from the combined portion of the output signals. In some instances, a zone may include a predetermined range of radial and azimuthal positions on the specimen. In one embodiment, the method may include determining a characteristic of polishing within more than one zone on the specimen. Some embodiments may include determining an additional characteristic of polishing from the characteristic of polishing within more than one zone on the specimen.
REFERENCES:
patent: 4369284 (1983-01-01), Chen
patent: 4618213 (1986-10-01), Chen
patent: 4926489 (1990-05-01), Danielson et al.
patent: 5486701 (1996-01-01), Norton et al.
patent: 5552704 (1996-09-01), Mallory et al.
patent: 5575598 (1996-11-01), Abe et al.
patent: 5605760 (1997-02-01), Roberts
patent: 5730642 (1998-03-01), Sandhu et al.
patent: 5747813 (1998-05-01), Norton et al.
patent: 5795688 (1998-08-01), Burdorf et al.
patent: 5872633 (1999-02-01), Holzapfel et al.
patent: 5893796 (1999-04-01), Birang et al.
patent: 5904609 (1999-05-01), Fukuroda et al.
patent: 5964643 (1999-10-01), Birang et al.
patent: 5970168 (1999-10-01), Montesanto et al.
patent: 5991699 (1999-11-01), Kulkarni et al.
patent: 6012966 (2000-01-01), Ban et al.
patent: 6045433 (2000-04-01), Dvir et al.
patent: 6045439 (2000-04-01), Birang et al.
patent: 6104835 (2000-08-01), Han
patent: 6146259 (2000-11-01), Zuniga et al.
patent: 6159073 (2000-12-01), Wiswesser et al.
patent: 6171181 (2001-01-01), Roberts et al.
patent: 6179709 (2001-01-01), Redeker et al.
patent: 6231434 (2001-05-01), Cook et al.
patent: 6247998 (2001-06-01), Wiswesser et al.
patent: 6254459 (2001-07-01), Bajaj et al.
patent: 6280290 (2001-08-01), Birang et al.
patent: 6282309 (2001-08-01), Emery
patent: 6328872 (2001-12-01), Talich et al.
patent: 6399501 (2002-06-01), Birang et al.
patent: 6433541 (2002-08-01), Lehman et al.
patent: 6529621 (2003-03-01), Glasser et al.
patent: 6602724 (2003-08-01), Redeker et al.
patent: 6614520 (2003-09-01), Bareket et al.
patent: 6628397 (2003-09-01), Nikoonahad et al.
patent: 6636301 (2003-10-01), Kvamme et al.
patent: 6671051 (2003-12-01), Nikoonahad et al.
patent: 6707540 (2004-03-01), Lehman et al.
patent: 6884146 (2005-04-01), Lehman et al.
patent: 0 628 806 (1994-12-01), None
patent: 1 022 093 (2000-07-01), None
patent: 1 066 925 (2001-01-01), None
patent: 1 081 489 (2001-03-01), None
patent: 1 093 017 (2001-04-01), None
patent: 99/22310 (1999-05-01), None
patent: 99/23449 (1999-05-01), None
patent: 99/25044 (1999-05-01), None
patent: 99/45340 (1999-09-01), None
patent: 00/00873 (2000-01-01), None
patent: 00/00874 (2000-01-01), None
patent: 00/18543 (2000-04-01), None
patent: 00/26609 (2000-05-01), None
patent: 00/26613 (2000-05-01), None
patent: 00/36525 (2000-06-01), None
patent: 00/68884 (2000-11-01), None
patent: 00/70332 (2000-11-01), None
patent: 01/40145 (2001-06-01), None
patent: 01/80304 (2001-10-01), None
Allen Ronald L.
Bevis Christopher F.
Chen Charles
Chen Haiguang
Lehman Kurt
Baker & McKenzie LLP
KLA-Tencor Technologies Corp.
Shakeri Hadi
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