4. Cleaning and liquid contact with solids
  5. Processes
  6. For metallic, siliceous, or calcareous basework, including...

Robert Roger Matthews

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Apparatus for the treatment and drying of semiconductor wafers i

Cleaning and liquid contact with solids – Apparatus – Sequential work treating receptacles or stations with means...
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Apparatus for the treatment of semiconductor wafers in a fluid

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
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Process for treatment of semiconductor wafers in a fluid

Cleaning and liquid contact with solids – Processes – For metallic – siliceous – or calcareous basework – including...
Patent

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