4. Chemistry: electrical and wave energy
  5. Apparatus
  6. Coating, forming or etching by sputtering

Robert J. Kolenkow

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Methods and apparatus for linear scan magnetron sputtering

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
Patent

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Methods and apparatus for sputtering with rotating magnet sputte

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Patent

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Wafer polisher head having floating retainer ring

Abrasive tool making process – material – or composition – Impregnating or coating an abrasive tool
Patent

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Profile ID: LFUS-PAI-P-507475

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