Coating apparatus
Gas or vapor deposition
With treating means
Inventor
active
Apparatus for chemical vapor deposition with clean effluent and
Apparatus for providing depletion-free uniform thickness CVD thi
Cross-flow diffusion furnace
CVD boat loading mechanism having a separable, low profile canti
Method for providing substantially waste-free chemical vapor dep
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Profile ID: LFUS-PAI-P-1054662