CVD boat loading mechanism having a separable, low profile canti

Details CVD boat loading mechanism having a separable, low profile canti CVD boat loading mechanism having a separable, low profile canti

1984-11-29

1986-11-25

Camby, John J.

Heating

Accessory means for holding, shielding or supporting work...

294 312, 414180, F27D 500, A47J 4500, B65G 2500

Patent

active

046246380

ABSTRACT:
A semi-cylindrical low-profile cantilevered paddle of refractory material is separably clamped to a cantilevered arm fastened to a movable boat-loader. A clamping mechanism is disclosed that preferably includes spaced brackets fastened to the arm defining retaining loops for slidably receiving the paddle. A flexible, stress-relief saddle portion is provided on one of the brackets. The rugged and breakage-resistant semi-cylindrical paddle is inexpensive to procure and replace, and its low profile makes it possible to adapt existing CVD furnaces for operation with larger semiconductor wafers.

REFERENCES:
patent: 3604694 (1971-09-01), Muller
patent: 3737282 (1973-06-01), Hearn et al.
patent: 3857598 (1974-12-01), Jelich
patent: 3908845 (1975-09-01), Bolt
patent: 4459104 (1984-07-01), Wollmann
patent: 4468195 (1984-08-01), Sasaki et al.
patent: 4516897 (1985-05-01), Snider et al.
patent: 4518349 (1985-05-01), Tressler et al.

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