4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Robert Chebi

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Apparatus for reducing process drift in inductive coupled plasma

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Patent

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Apparatus for reducing process drift in inductive coupled...

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
Reexamination Certificate

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Methods for reducing contamination of semiconductor substrates

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
Reexamination Certificate

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Methods for reducing contamination of semiconductor substrates

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
Reexamination Certificate

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Process for etching dielectric films with improved resist...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1290477

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