4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Richard Stephen Wise

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Anisotropic and selective nitride etch process for high aspect r

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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On-chip cooling systems for integrated circuits

Active solid-state devices (e.g. – transistors – solid-state diode – Housing or package – With provision for cooling the housing or its contents
Reexamination Certificate

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Reduced dielectric constant spacer materials integration for...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1962611

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