On-chip cooling systems for integrated circuits

Active solid-state devices (e.g. – transistors – solid-state diode – Housing or package – With provision for cooling the housing or its contents

Reexamination Certificate

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Details

C257S712000, C257S522000, C257SE23099, C438S214000

Reexamination Certificate

active

07659616

ABSTRACT:
Structures and methods for forming the same. A semiconductor chip includes a substrate and a transistor. The chip includes N interconnect layers on the substrate, N being a positive integer. The chip includes a cooling pipes system inside the N interconnect layers. The cooling pipes system does not include any solid or liquid material. Given any first point and any second point in the cooling pipes system, there exists a continuous path which connects the first and second points and which is totally within the cooling pipes system. A first portion of the cooling pipes system overlaps the transistor. A second portion of the cooling pipes system is higher than the substrate and lower than a top interconnect layer. The second portion is in direct physical contact with a surrounding ambient.

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patent: 6078088 (2000-06-01), Buynoski
patent: 6130151 (2000-10-01), Lin et al.
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patent: 6576976 (2003-06-01), Lien et al.
patent: 7091604 (2006-08-01), Wylie et al.
patent: 2005/0026397 (2005-02-01), Daubenspeck et al.

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