Single-crystal, oriented-crystal, and epitaxy growth processes;
Forming from vapor or gaseous state
With decomposition of a precursor
Inventor
active
Device and method for producing at least one SiC single crystal
Device having a foil-lined crucible for the sublimation...
Metal-insulator semiconductor field-effect transistor
Method for electrolytic etching of silicon carbide
Method for growing an &agr;-SiC bulk single crystal
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