4. Single-crystal, oriented-crystal, and epitaxy growth processes;
  5. Processes of growth with a subsequent step acting on the...

Reinhold Wahlich

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Film or layer made of semi-conductive material and method...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Film or layer of semiconducting material, and process for...

Active solid-state devices (e.g. – transistors – solid-state diode – Integrated circuit structure with electrically isolated... – Including dielectric isolation means
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Layered semiconductor wafer with low warp and bow, and...

Semiconductor device manufacturing: process – Chemical etching
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Method and apparatus for leveling a semiconductor wafer, and...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Method for reducing and homogenizing the thickness of a...

Etching a substrate: processes – Nongaseous phase etching of substrate – Etching inorganic substrate
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