Chemistry: electrical and wave energy
Apparatus
Coating, forming or etching by sputtering
Inventor
active
Apparatus for coating substrates by means of a magnetron cathode
Apparatus for the evaporative coating of substrates
Cathode sputtering apparatus on the magnetron principle with a h
Magnetron cathode for cathodic evaportion apparatus
Magnetron cathode for sputtering ferromagnetic targets
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Profile ID: LFUS-PAI-P-471684