Magnetron cathode for cathodic evaportion apparatus

Details Magnetron cathode for cathodic evaportion apparatus Magnetron cathode for cathodic evaportion apparatus

1984-06-27

1985-05-07

Demers, Arthur P.

Chemistry: electrical and wave energy

Apparatus

Coating, forming or etching by sputtering

204192R, C23C 1500

Patent

active

045156751

ABSTRACT:
A magnetron cathode for cathodic evaporation apparatus with a target holder (10) for releasably securing a plate-like target (9). The associated magnet arrangement (7) has pole faces (7c, 7d) for producing at least one circumferentially closed tunnel of magnetic field lines which overlaps the target. The magnet arrangement (7) is accommodated in a housing of non-ferromagnetic material which extends over the pole faces. To increase the utilization factor of the target material without the pole faces or housing parts participating in the atomization process,

REFERENCES:
patent: 3878085 (1975-04-01), Corbani
patent: 3956093 (1974-12-01), McCleod
patent: 4198283 (1980-04-01), Class et al.
patent: 4219397 (1980-08-01), Clarke
patent: 4247383 (1981-01-01), Greve et al.
patent: 4282083 (1981-08-01), Kertesz et al.

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