4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Combined with coating step

Rebecca Mih

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Dual damascene flowable oxide insulation structure and...

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
Reexamination Certificate

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Dual damascene flowable oxide insulation structure and...

Active solid-state devices (e.g. – transistors – solid-state diode – Combined with electrical contact or lead – Of specified material other than unalloyed aluminum
Reexamination Certificate

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Dual mask process for semiconductor devices

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate

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In situ formation of protective layer on silsesquioxane...

Active solid-state devices (e.g. – transistors – solid-state diode – Combined with electrical contact or lead – Of specified configuration
Reexamination Certificate

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Interim oxidation of silsesquioxane dielectric for dual...

Active solid-state devices (e.g. – transistors – solid-state diode – With means to control surface effects – Insulating coating
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2018057

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