4. Thermal measuring and testing
  5. Temperature measurement
  6. In spaced noncontact relationship to specimen

Raymond Moser

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Apparatus for measuring pedestal temperature in a semiconductor

Thermal measuring and testing – Temperature measurement – In spaced noncontact relationship to specimen
Patent

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Bipolar electrostatic chuck and method of making same

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Patent

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Capacitive probe for in situ measurement of wafer DC bias voltag

Electricity: measuring and testing – Testing potential in specific environment – Voltage probe
Patent

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Impedance matching network

Wave transmission lines and networks – Coupling networks – With impedance matching
Patent

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Profile ID: LFUS-PAI-P-399750

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