Semiconductor device manufacturing: process
Coating of substrate containing semiconductor region or of...
Insulative material deposited upon semiconductive substrate
Inventor
active
As-deposited planar optical waveguides with low scattering...
Biased pulse DC reactive sputtering of oxide films
Biased pulse DC reactive sputtering of oxide films
Biased pulse DC reactive sputtering of oxide films
Biased pulse DC reactive sputtering of oxide films
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