4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Ratsamee Limdulpaiboon

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Helium-based etch process in deposition-etch-deposition gap...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Helium-based etch process in deposition-etch-deposition gap...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Resolving of fluorine loading effect in the vacuum chamber

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2416671

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