Coating apparatus
Gas or vapor deposition
Work support
Inventor
active
Bubbler for solid metal organic source material and method of pr
Field emitter structure and fabrication process providing passag
Field emitter structure providing passageways for venting of out
MOCVD reactor system for indium antimonide epitaxial material
Self-aligned gate process for fabricating field emitter arrays
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Profile ID: LFUS-PAI-P-365613