Drying and gas or vapor contact with solids – Process – With fluid current conveying or suspension of treated material
Patent
1995-05-31
1996-09-10
Sollecito, John M.
Drying and gas or vapor contact with solids
Process
With fluid current conveying or suspension of treated material
34363, 34576, 34582, 118726, F26B 308, F26B 1700
Patent
active
055533957
ABSTRACT:
A cone-shaped bubbler for use with solid metal organic source material used in metal organic chemical vapor phase deposition systems, and a method of producing carrying gas saturated with source material that is injected into such systems. The bubbler comprises a sealed container having a slanted wall with an inverted cone-shaped cross section. Solid metal organic source material is disposed in the container. A heat bath surrounds the sealed container. A carrying gas inlet is disposed adjacent the top of the container. Carrying gas is injected in a tangential direction relative to the source material, and a whirlpool effect is generated by the tangential gas flow that imparts a centrifugal force to gas molecules, pushing the source material against the wall to promote heat flow from the heat bath to sustain high rate sublimation. A gas outlet is disposed adjacent the bottom of the container. Once source material lining the slanted inner wall is removed, gravitational forces cause source material to refill the empty space, reducing channel formation and preventing thermal isolation of the source material at the center of the bubbler. The method comprises providing a sealed container with a slanted wall having an inverted cone-shaped cross section, disposing solid metal organic source material in the container, heating the sealed container, injecting a carrying gas adjacent the top of the container so that carrying gas is injected in a tangential direction relative to the solid source material, and removing saturated carrying gas from a gas outlet disposed adjacent the bottom of the container.
REFERENCES:
patent: 4101263 (1978-07-01), Lumpkin, Jr.
patent: 5243767 (1993-09-01), Stein
patent: 5377429 (1995-01-01), Sandhu et al.
patent: 5381605 (1995-01-01), Krafft
patent: 5489166 (1996-02-01), Schmit
Rolph Randy K.
Wen Cheng P.
Zielinski Timothy T.
Denson-Low W. K.
Gravini Steve
Hughes Aircraft Company
Lachman M. E.
Sales M. W.
LandOfFree
Bubbler for solid metal organic source material and method of pr does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Bubbler for solid metal organic source material and method of pr, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Bubbler for solid metal organic source material and method of pr will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1311334