4. Abrading
  5. Precision device or process - or with condition responsive...
  6. By optical sensor

Randolph E. Treur

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Angular spin, rinse, and dry module and methods for making...

Cleaning and liquid contact with solids – Processes – With work or work parts movable during treatment
Reexamination Certificate

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Angular spin, rinse, and dry module and methods for making...

Cleaning and liquid contact with solids – Apparatus – With means to movably mount or movably support the work or...
Reexamination Certificate

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Apparatus for monitoring a semiconductor wafer during a spin...

Drying and gas or vapor contact with solids – Apparatus – With apparatus using centrifugal force
Reexamination Certificate

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Apparatus for oscillating a head and methods for...

Active solid-state devices (e.g. – transistors – solid-state diode – Miscellaneous
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Chuck assembly for use in a spin, rinse, and dry module and...

Chucks or sockets – Radially reciprocating jaws – Wedge actuated
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Profile ID: LFUS-PAI-P-1822332

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