Active solid-state devices (e.g. – transistors – solid-state diode – Miscellaneous
Reexamination Certificate
2007-01-30
2007-01-30
Coleman, W. David (Department: 2823)
Active solid-state devices (e.g., transistors, solid-state diode
Miscellaneous
C451S106000, C134S001200
Reexamination Certificate
active
10738164
ABSTRACT:
An apparatus for brushing a surface of a substrate is provided. The apparatus includes a brush for scrubbing the surface of the substrate, a head for holding the brush, and an arm. The arm is configured to hold the head about a connection point. The arm is connected to an oscillating mechanism configured to cause the head to oscillate at an angle of rotation about the connection point.
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Anderson Tom
Boyd John M.
de Larios John
Treur Randolph E.
Coleman W. David
Lam Research Corporation
Martine & Penilla & Gencarella LLP
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