Apparatus and method for mapping plasma characteristics

Details Apparatus and method for mapping plasma characteristics Apparatus and method for mapping plasma characteristics

1995-12-22

1997-08-05

Evans, F. L.

Optics: measuring and testing

By dispersed light spectroscopy

With sample excitation

G01N 2162

Patent

active

056547960

ABSTRACT:
An apparatus and method for mapping characteristics of a volume of plasma in a plasma reaction chamber uses a photosensitive detector, a scanner that scans the volume, and a light directing element that directs light emissions from the volume scanned by the scanner to the photosensitive detector. The photosensitive detector generates a signal corresponding to a detected amount of the light emissions from the volume and the signal is processed to estimate one or more characteristics of the volume.

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