4. Radiation imagery chemistry: process, composition, or product th
  5. Imaging affecting physical property of radiation sensitive...
  6. Radiation sensitive composition or product or process of making

Ramkumar Subramanian

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Active control of developer time and temperature

Photography – Fluid-treating apparatus – Fluid application to one side only of photographic medium
Reexamination Certificate

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Active control of phase shift mask etching process

Etching a substrate: processes – Forming or treating mask used for its nonetching function
Reexamination Certificate

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Anti-reflective coating layer for semiconductor device

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Antireflective siliconoxynitride hardmask layer used during etch

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Patent

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Apparatus and method for reducing defects in a semiconductor...

Image analysis – Applications – Manufacturing or product inspection
Reexamination Certificate

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Profile ID: LFUS-PAI-P-357925

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