4. Electricity: motive power systems
  5. Positional servo systems
  6. With stabilizing features

Ramidin Izair Kamidi

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Lithographic apparatus and control method

Data processing: generic control systems or specific application – Generic control system – apparatus or process – Digital positioning
Reexamination Certificate

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Lithographic apparatus and device manufacturing method

Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate

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Method for controlling a positioning device, positioning...

Electricity: motive power systems – Positional servo systems – With stabilizing features
Reexamination Certificate

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Profile ID: LFUS-PAI-P-3162703

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