Electricity: motive power systems – Positional servo systems – With stabilizing features
Reexamination Certificate
2006-04-07
2008-11-18
Ip, Paul (Department: 2837)
Electricity: motive power systems
Positional servo systems
With stabilizing features
C318S135000, C318S560000, C318S609000, C318S632000
Reexamination Certificate
active
07453228
ABSTRACT:
In a method for controlling a positioning device, the positioning device has a stator and mover, the mover being movable relative to the stator; a position sensor configured to generate a position signal indicative of a position of the mover relative to the stator; a controller configured to receive the position signal, compare it to a setpoint signal to obtain an error signal, and generate a mover control signal on the basis of a signal component of the position signal, the controller having a variable gain. The positioning device, including the position sensor and the controller, defines a control loop. For error signals having a magnitude in a predefined range, the gain is selectively set to a value higher than a value for error signals having a magnitude outside the range.
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Heertjes Marcel François
Houben Dennis Andreas Petrus Hubertina
Kamidi Ramidin Izair
Tso Yin Tim
ASML Netherlands B.V.
Ip Paul
Koninklijke Philips Electronics
Sterne, Kessler, Goldstein & Fox P.L.L.C
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