Lithographic apparatus and control method

Details Lithographic apparatus and control method Lithographic apparatus and control method

2005-09-16

2010-02-02

Hartman, Jr., Ronald D (Department: 2121)

Data processing: generic control systems or specific application

Generic control system, apparatus or process

Digital positioning

C700S058000, C700S059000, C700S060000, C700S064000, C700S070000, C700S121000

Reexamination Certificate

active

07657334

ABSTRACT:
A lithographic apparatus includes a movable part and a controller to control a position quantity of the movable part. The controller includes a first controller transfer function and a second controller transfer function. A selector selects the first controller transfer function or the second controller transfer function depending on a state of the movable part. The first controller transfer function may be chosen in a substantially stationary state of the movable part, while in a substantially non-stationary state of the movable part, the second controller transfer function may be chosen.

REFERENCES:
patent: 5517097 (1996-05-01), Hayashida
patent: 6795163 (2004-09-01), Finders
patent: 6809797 (2004-10-01), Baselmans et al.
patent: 7046093 (2006-05-01), McDonagh et al.
patent: 7098990 (2006-08-01), Butler
patent: 7289858 (2007-10-01), Van Donkelaar et al.
patent: 2004/0176861 (2004-09-01), Butler

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