Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2006-05-04
2009-08-18
Lee, Diane I (Department: 2851)
Photocopying
Projection printing and copying cameras
Step and repeat
C355S072000, C355S075000, C700S045000, C700S121000
Reexamination Certificate
active
07576832
ABSTRACT:
A lithographic apparatus includes a movable object and a control system to control the position of the movable object. The control system includes a position measurement system configured to measure the position of the movable object, a comparative unit configured to generate a servo error signal by subtracting a position signal representative of an actual position of the movable object from a reference signal, a control unit configured to generate a first control signal based on the servo error signal, a feed-forward unit configured to generate a feed-forward signal based on the reference signal, an addition unit configured to generate a second control signal by adding the first control signal and the feed-forward signal, and an actuator unit configured to actuate the movable object. A gain of the feed-forward unit is dependent on the position of the movable object.
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Kamidi Ramidin Izair
Tousain Rob
Tso Yin Tim
ASML Netherlands B.V.
Lee Diane I
Pillsbury Winthrop Shaw & Pittman LLP
Whitesell-Gordon Steven H
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