4. Coating apparatus
  5. Gas or vapor deposition
  6. With treating means

Quoc Truong

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Apparatus and methods for controlling process chamber pressure

Fluid handling – With heating or cooling of the system
Patent

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Method and apparatus for self-cleaning a blocker plate

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Ozone enhancement unit

Gas separation: apparatus – Electric field separation apparatus – Including gas flow distribution means
Patent

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Pressure flow and concentration control of oxygen/ozone gas mixt

Fluid handling – Processes – With control of flow by a condition or characteristic of a...
Patent

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Resonant chamber applicator for remote plasma source

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Profile ID: LFUS-PAI-P-429987

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