Method and apparatus for self-cleaning a blocker plate

Details Method and apparatus for self-cleaning a blocker plate Method and apparatus for self-cleaning a blocker plate

1996-09-09

1999-03-16

Breneman, R. Bruce

Coating apparatus

Gas or vapor deposition

With treating means

118723E, 156345, 134 11, 1341041, 438729, C23C 1600

Patent

active

058824146

ABSTRACT:
The present invention provides a method and apparatus for introducing gases into a processing chamber and cleaning isolated surfaces thereof. In one embodiment, the apparatus provides a gas distribution system which comprises a face plate and a blocker plate located adjacent the face plate wherein the blocker plate is electrically insulated from the face plate. An RF power source is electrically connected to the face plate and a switch that selectively connects the blocker plate to the RF power source or grounds the blocker plate. When the power source is applied to the faceplate and the blocker plate is grounded, an energy potential is formed between the face plate and the blocker plate. The energy potential is sufficient to strike a plasma from cleaning gases introduced into the gas distribution system to clean the apertures and surfaces of both the face plate and the blocker plate.

REFERENCES:
patent: 4960488 (1990-10-01), Law et al.
patent: 5647911 (1997-07-01), Vanell et al.
patent: 5647913 (1997-07-01), Blalock

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