Pressure flow and concentration control of oxygen/ozone gas mixt

Details Pressure flow and concentration control of oxygen/ozone gas mixt Pressure flow and concentration control of oxygen/ozone gas mixt

1997-05-14

1999-05-18

Ferensic, Denise L.

Fluid handling

Processes

With control of flow by a condition or characteristic of a...

73 232, 42218614, 1374875, G05D11/03

Patent

active

059041706

ABSTRACT:
A system for controlling pressure flow and concentration Of O.sub.3 /O.sub.2 positions a thermal MFC upstream from an ozone generator to avoid the adverse effects of ozone on the thermal MFC. A flow restrictor diverts a precise amount of flow to an ozone monitor so that the flow to a CVD chamber is precisely controlled. In other embodiments a full-flow ozone monitor and non-thermal MFC are utilized.

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patent: 5370846 (1994-12-01), Yokomi
patent: 5644070 (1997-07-01), Gibboney

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