Chemistry: electrical and wave energy
Processes and products
Coating, forming or etching by sputtering
Inventor
active
Adjustment of deposition uniformity in an inductively coupled pl
Alternate steps of IMP and sputtering process to improve...
Apparatus for improved power coupling through a workpiece in...
Apparatus for providing RF return current path control in a...
Asymmetric rotating sidewall magnet ring for magnetron...
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Profile ID: LFUS-PAI-P-1392019