Asymmetric rotating sidewall magnet ring for magnetron...

Details Asymmetric rotating sidewall magnet ring for magnetron... Asymmetric rotating sidewall magnet ring for magnetron...

2005-01-04

2005-01-04

McDonald, Rodney G. (Department: 1753)

Chemistry: electrical and wave energy

Apparatus

Coating, forming or etching by sputtering

C204S298120, C204S198001, C204S298200, C204S298210

Reexamination Certificate

active

06837975

ABSTRACT:
A magnetron system for a sputtering target having an annular vault facing the wafer to be coated and having inner and outer sidewalls and a roof. A small magnetron is positioned over the roof. A first magnet assembly having a first magnet polarity along the target axis is positioned behind the inner sidewall. A second magnet assembly having an opposed second opposed magnetic polarity is disposed in back of the outer sidewall and has magnetic strength much greater than the first magnet assembly but its strength is asymmetrically distributed about the target axis. The second magnet assembly and the roof assembly are rotated together about the target axis. The rotating asymmetric sidewall magnet assembly may also be used with a hollow-cathode target, with or without a roof magnetron.

REFERENCES:
patent: 5417833 (1995-05-01), Harra et al.
patent: 5660744 (1997-08-01), Sekine et al.
patent: 6217716 (2001-04-01), Lai
patent: 6251242 (2001-06-01), Fu et al.
patent: 6277249 (2001-08-01), Gopalraja et al.
patent: 6352629 (2002-03-01), Wang
patent: 6406599 (2002-06-01), Subramani et al.
patent: 6436251 (2002-08-01), Gopalraja et al.
patent: 6444104 (2002-09-01), Gopalraja et al.
patent: 6451177 (2002-09-01), Gopalraja et al.
patent: 6485617 (2002-11-01), Fu et al.
patent: 6485618 (2002-11-01), Gopalraja et al.
patent: 1119017 (2001-07-01), None

Affiliated with

Also associated with

Rating

Asymmetric rotating sidewall magnet ring for magnetron... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Asymmetric rotating sidewall magnet ring for magnetron..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Asymmetric rotating sidewall magnet ring for magnetron... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3416521