4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Pin-Yi Hsin

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Deep UV-resistant photoresist plug for via hole

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
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Method to control spacer width

Semiconductor device manufacturing: process – Including control responsive to sensed condition – Optical characteristic sensed
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Method to improve etching of resist protective oxide (RPO)...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Plasma etch method incorporating inert gas purge

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Plasma etching method to form dual damascene with improved...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Profile ID: LFUS-PAI-P-2449677

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