4. Semiconductor device manufacturing: process
  5. Making field effect device having pair of active regions...
  6. On insulating substrate or layer

Phillip S. Green

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Deposition method of insulating layers having low dielectric...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – On insulating substrate or layer
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Deposition method of insulating layers having low dielectric...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – On insulating substrate or layer
Reexamination Certificate

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Helium-based etch process in deposition-etch-deposition gap...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Helium-based etch process in deposition-etch-deposition gap...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Method of fabricating semiconductor device

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
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