4. Etching a substrate: processes
  5. Forming or treating an article whose final configuration has...

Philip V. Kaszuba

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Apparatus and method for selected site backside unlayering...

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
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Integrated circuit and methods of measurement and...

Active solid-state devices (e.g. – transistors – solid-state diode – Test or calibration structure
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Method of manufacturing silicided silicon microtips for scanning

Etching a substrate: processes – Forming or treating an article whose final configuration has...
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Silicided silicon microtips for scanning probe microscopy

Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element
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System and method for detecting local mechanical stress in...

Optics: measuring and testing – Material strain analysis
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Profile ID: LFUS-PAI-P-1814618

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