4. Data processing: generic control systems or specific application
  5. Specific application, apparatus or process
  6. Product assembly or manufacturing

Peter Porshnev

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Efficient cleaning by secondary in-situ activation of etch...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Method for treatment of plating solutions

Liquid purification or separation – Processes – Ion exchange or selective sorption
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Methods and apparatus for improving operation of an...

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
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Plasma immersed ion implantation process using balanced...

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Plasma
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Treatment of effluent from a substrate processing chamber

Chemical apparatus and process disinfecting – deodorizing – preser – Chemical reactor – With means applying electromagnetic wave energy or...
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Profile ID: LFUS-PAI-P-2204944

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