Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate
2011-06-28
2011-06-28
Von Buhr, M. N. (Department: 2121)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Product assembly or manufacturing
C700S030000, C700S032000
Reexamination Certificate
active
07970483
ABSTRACT:
In one aspect of the invention, a method for the improved operation of an electronic device manufacturing system is provided. The method includes providing information to an interface coupled to an electronic device manufacturing system having parameters, processing the information to predict a first parameter, and providing an instruction related to at least a second parameter of the electronic device manufacturing system wherein the instruction is based on the predicted first parameter. Numerous other aspects are provided.
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Curry Mark W.
Fox Allen
Porshnev Peter
Raoux Sebastien
Applied Materials Inc.
Buhr M. N. Von
Dugan & Dugan P.C.
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