Liquid purification or separation – Processes – Ion exchange or selective sorption
Reexamination Certificate
2006-10-04
2009-10-13
Savage, Matthew O (Department: 1797)
Liquid purification or separation
Processes
Ion exchange or selective sorption
C210S664000, C210S665000, C210S667000, C210S669000, C210S681000, C210S688000, C210S719000, C210S737000, C210S912000
Reexamination Certificate
active
07601264
ABSTRACT:
Embodiments herein provide waste abatement apparatuses and methods for treating waste solutions derived from depleted or used plating solutions, such as from an electroless deposition process or an electrochemical plating process. The waste abatement systems and processes may be used to treat the waste solutions by lowering the concentration of, if not completely removing, metal ions or reducing agents that are dissolved within the waste solution. In one embodiment of a demetallization process, a waste solution may be exposed to a heating element (e.g., copper coil) contained within an immersion tank. In another embodiment, the waste solution may be exposed to a catalyst having high surface area (e.g., steel wool or other metallic wool) within an immersion tank. In another embodiment, the waste solution may be flowed through a removable, catalytic conduit (e.g., copper tubing) having an internal catalytic surface.
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Golden Josh H.
Krishnan Nikhil
Porshnev Peter
Sista Kalyan
Weidman Timothy
Applied Materials Inc.
Patterson & Sheridan LLP
Savage Matthew O
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