4. Active solid-state devices (e.g., transistors, solid-state diode
  5. Physical configuration of semiconductor
  6. With electrical contact in hole in semiconductor

Peter James Lindgren

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active

Cobalt disilicide structure

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Reexamination Certificate

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Metal adhesion by induced surface roughness

Semiconductor device manufacturing: process – Packaging or treatment of packaged semiconductor – Making plural separate devices
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Through substrate annular via including plug filler

Active solid-state devices (e.g. – transistors – solid-state diode – Physical configuration of semiconductor – With electrical contact in hole in semiconductor
Reexamination Certificate

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Through substrate via including variable sidewall profile

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Wet cleans for cobalt disilicide processing

Semiconductor device manufacturing: process – Chemical etching – Liquid phase etching
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Profile ID: LFUS-PAI-P-2229492

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