4. Coating apparatus
  5. Gas or vapor deposition
  6. Work support

Pei-Wei Tsai

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Arc chamber for ion implanter

Radiant energy – Ion generation – Arc type
Patent

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Connecting structure between fluid channel

Pipe joints or couplings – Adjustable angle
Reexamination Certificate

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Control device for maintaining a chemical mechanical polishing m

Abrading – Precision device or process - or with condition responsive... – With indicating
Patent

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Height gauge device for wafer

Abrading – Precision device or process - or with condition responsive... – With feeding of tool or work holder
Patent

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Insulating apparatus for a conductive line

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Profile ID: LFUS-PAI-P-691120

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